Axcelis Announces First Order for 'Purion XE Power Series' Implanter
Summary
BEVERLY, Mass., June 25, 2019 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received the first order for the new Purion XE Power Series™ implanter from a leading power device manufacturer. Bill Bintz, executive vice president, product development, commented, "We continue to make strides on our market segmentation strategy, by expanding the Purion platform with new product extensions featuring enabling technology aimed at emerging markets. Building on our Silicon Carbide expertise, the Purion XE Power Series provides customers with unmatched reliability and productivity, combined with uniquely differentiated high temperature implantation and flexible substrate handling capability. This includes the flexibility to handle multiple wafer sizes from 150mm to 300mm as well as various substrates including Si and SiC, along with its precision wafer temperature control technology, all accomplished while delivering the industrys highest throughput and capital efficiency. Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 40 years.