Newport Introduces Higher Accuracy, FMS Linear Stages for Metrology
Summary
Press Releases Newport Corporation Press Release Receive press releases from Newport Corporation: By Email RSS Feeds: Newport Introduces Higher Accuracy, FMS Linear Stages for Metrology Irvine, CA, October 03, 2012 --( With all-steel construction, the FMS Series combines high stiffness and thermal stability for robust, highly precise, and repeatable measurements.For added flexibility in gathering metrology data, the FMS Series is compatible with Newports high-performance 8-axis XPS Universal Controller, an ESP-compatible, integrated controller/driver.Irvine, CA, October 03, 2012 --( PR.com )-- Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, introduces the last installment of high accuracy FMS stages for higher-end metrology applications.Developed specifically to address the needs of surface metrology applications, the FMSxxHA stages are available in 100, 200 and 300 mm models.The FMSxxHA is driven by a stepper motor, with a linear encoder that provides exceptional on-axis accuracy down to 1µm and sub-micron bi-directional repeatability.For added flexibility in gathering metrology data, the FMS Series is compatible with Newports high-performance 8-axis XPS Universal Controller, an ESP-compatible, integrated controller/driver.
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