WaferSense® Vibration Sensor Helps Diffusion Furnace Team Identify Vibration Sources to Increase Wafer Yield
Summary
Press Releases CyberOptics Semiconductor Press Release Receive press releases from CyberOptics Semiconductor: By Email RSS Feeds: WaferSense® Vibration Sensor Helps Diffusion Furnace Team Identify Vibration Sources to Increase Wafer Yield When a diffusion furnace team at a 200 mm fab experienced defect problems in specific stocker locations of its high volume semiconductor process, CyberOptics WaferSense® Auto Vibration Sensors helped test a theory that excessive vibrations created by stocker fans effected die yield.The AVS’ data logging capabilities allowed the fab to establish new preventative maintenance requirements and process control standards for both the tools and engineers.### Wilsonville, OR, July 08, 2011 --( PR.com )-- Shaped like a wafer, WaferSense Auto Vibration Sensors (AVS) can travel along an entire wafer path, collecting, recording and displaying exact vibration exposure.Using Bluetooth technology, the wireless sensor provided wireless real-time data on tool vibration as it moved through the semiconductor process.With companion software displaying data on a GUI, engineers were able to overlay vibration fingerprints and analyze vibration data.The AVS’ data logging capabilities allowed the fab to establish new preventative maintenance requirements and process control standards for both the tools and engineers.Detailed information on CyberOptics’ WaferSense products Auto Vibration Sensors is available online at http://www.cyberopticssemi.com/products/wafersense/avs or by contacting sales at (503) 495-2200 for more information.### Contact Information CyberOptics Semcionductor Lindsey Dietz 800-366-9131 www.CyberOpticsSemi.com Click here to view the list of recent Press Releases from CyberOptics Semiconductor