Advanced Energy at SEMICON Japan 2023
Summary
From December 13-15, visitors to Advanced Energys booth 4920 will discover new products such as the eVerest RF Plasma Power Generator and innovative eVoS Asymmetric Bias Waveform Generator. These products are engineered to deliver the precise plasma control, stability and repeatability essential for maximizing throughput and yield in the fabrication of next-generation, sub-2 nm semiconductors. “Following the successful launch of eVerest, eVoS ME and the latest Luxtron solutions at SEMICON West, we look forward to showcasing these transformational technologies for next-generation process architectures at SEMICON Japan." In addition to plasma power, RF measurement, temperature measurement and temperature control solutions, visitors can view the PowerInsight by Advanced Energy IoT data ecosystem. This platform enables access to high-resolution, high-bandwidth data and supports faster, more accurate process characterization and troubleshooting.